3DX: 3D Measurements on the fly
For back-end semiconductor applications, there’s nothing like 3DX.
- Complete, high fidelity images
- 25mm and 50mm fields of view
- Measures 50,000 units per hour
- No need to stop the line—measures parts on the move!
- Compare accuracy and repeatability…none better
- Measures multiple units in the same field of view

3DX captures and measures units in 3D on the fly,
without having to stop and position them!
Download a Coherix 3DX Brochure
(328 KB - Requires Adobe Acrobat Reader)
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